Tek Vac PECVD w/ RIE Plasma-enhanced Chemical Vapor Deposition System (7285) R

Tek Vac PECVD w/ RIE Plasma-enhanced Chemical Vapor Deposition System (7285) R

$50,000 (USD)

Goleta, CA

orCall (805)-680-7222

Description

Tek Vac PECVD w/ RIE Plasma-enhanced Chemical Vapor Deposition System +More 7285 Taken out of a working environment. Although this came out of a working environment, it is a complex piece and machinery and it will surely need some fine tuning and work, In good cosmetic condition. All of the controllers in the control cabinet power on, buttons and digital screens respond well to input. Unable to test further. Taken out of a working environment. See pictures for more detail.The previous technician that operated it was disappointed when the company decided to replace this system because it was reliable and never broke down. It was removed from a large and local company and moved less then 10miles to our facility. Some Support may be available from an employee from the company that was operating it. Manufacturer:Tek Vac Model:PECVD w/ RIE ; Plasma-enhanced Chemical Vapor Deposition System w/ Reactive Ion Etching System For 6" Wafers Includes: Control Cabinet (Raceway) Granville-Phillips Vacuum Gauge Controller 307001 MKS Type 247 4 Channel Readout (Qty: 2) Agilent Technologies XGS-600 Hot Filament Board HFIG** PCB, Field Install R3075301 Analog Input PCB, Field Install R3487301 VAT Adaptive Pressure Controller PM-5 Cesar 136 Dressler RF Power Generator VM 600 A Dressler Power Supply VM 1500 W-ICP RF Generator (Qty: 2) Alcatel ACT 1000T EA7-TBC-07Y22B056 AutomationDrirect Operator Panel Alcatel ATP-900 Turbomolecular Pump MKS Type 247 Four Channel Flow Controller and Power Supply (Qty: 2) ESVP-1002-NWB 1" Pneumatic Angle Valve Direct Logic 06 PLC VAT 796-091902R001 Gate Valve with ASS Ag-Schweiz 84021-R1 MDC RGV-16P Rectangular Vacuum Gate Valve (Qty: 2) Mass Flow Controllers: Clerity Unit: Models: UFC-166 x2, UFC-8100, UFC-1260A MKS Mass Flow: Models: 1179A22CR1CV, 1179A22CR1CV-Sx2, 1479A07012CR1CV Specifications: Outer Diameter of each Chamber: 12" Wafer Size: 6" Power: 208 Volts Compressed Air: 60-80 PSI Pump Purge: N2: 15 PSI Required Power: 110V & 220V 30A Shipping: Shipping Weight: Shipping Dimensions: Actual Weight: 1160 lbs Actual Dimensions: (Raceway: 22x30x74") + 50x36x80" Crating Fee: $250 Sold as is with 30day Right of Return, only pictured items included Easy return/refund for any reason Anacapa Equipment RETURNS Anacapa Equipment Brokers, Inc. (Seller) strives to offer excellent customer service. You may return any equipment purchased from us for any reason within thirty (30) days after your receipt of the equipment for a full refund of the purchase price, provided that returned items are received in the same condition as sent. We DO NOT ship internationally. If you are using a freight forwarder then returns are VOID. SHIPPING All equipment purchased is shipped within one (1) business day (subject to freight availability) after receipt of payment and is shipped FOB place of shipment. We only charge actual shipping cost. If eBay overcharges for shipping, we issue an immediate refund for the difference. If you are undercharged, we will absorb the cost. We DO NOT ship internationally. IF you are using a freight forwarder then returns are VOID. LIMITED WARRANTY Buyer acknowledges that the equipment is being sold as is" and without any warranty of merchantability or fitness for a particular use. The entire risk as to the quality and performance of the equipment is with the Buyer. Should the equipment prove defective following its purchase the Buyer and not the Seller, manufacturer, distributor, or retailer assumes the entire cost of all necessary servicing or repair. Buyer may inspect the equipment prior to purchase and placement of the order. Failure to inspect prior to placement of an order is deemed a waiver of Buyers right to inspect. Buyer is responsible for determining the suitability of the equipment for its application. Seller assumes no liability for the use or misuse of any equipment purchased by Buyer. It is assumed that the equipment will be installed and operated by qualified personnel. The Buyer agrees that the Seller shall not be held responsible or liable for any injuries or damages, whether incidental or consequential, associated in any way with the equipment purchased. The Buyer, by purchasing this equipment, indicates its acknowledgment of, and agreement, to the terms of this limited warranty . INDEMNITY Buyer shall be solely liable for, and shall defend, indemnify, and hold Seller, its Affiliates, and all of their respective directors, officers, employees, agents, and independent contractors (Indemnitees) harmless from and against any and all damages, liabilities, injuries, losses, costs (including reasonable attorneys and experts fees at trial and on appeal), and expenses which may be incurred by, asserted against, or recoverable from any Indemnitee as a result of any actual or threatened action, suit or proceeding arising out of or relating in any way to the purchase of equipment from Seller. The validity and interpretation of this Agreement and the enforcement thereof shall be governed by the laws of the State of California without regard to any principles governing conflicts of laws. Any dispute arising from the purchase of equipment from Seller must be resolved in the State Courts of California.

Specifications

ManufacturerTek Vac
ModelPECVD w/ RIE ; Plasma-enhanced Chemical Vapor Deposition System w/ Reactive Ion Etching System
ConditionUsed
MKS Type 247 4 Channel Readout (Qty2)
VM 1500 W-ICP RF Generator (Qty2)
MKS Type 247 Four Channel Flow Controller and Power Supply (Qty2)
MDC RGV-16P Rectangular Vacuum Gate Valve (Qty2)
Models1179A22CR1CV, 1179A22CR1CV-Sx2, 1479A07012CR1CV
Outer Diameter of each Chamber12"
Wafer Size6"
Power208 Volts
Compressed Air60-80 PSI
Required Power110V & 220V 30A
Actual Weight1160 lbs
Crating Fee$250