PVA TePla Ion 40 Barrel Plasma Reactor System Plasma Cleaner, Etch, Strip 7181

PVA TePla Ion 40 Barrel Plasma Reactor System Plasma Cleaner, Etch, Strip 7181

$65,000 (USD)

Goleta, CA

orCall (805)-680-7222

Description

PVA TePla Ion 40 Plasma Reactor, Etch, Strip, Clean, Wafer Surface Treatment System 7181R In good cosmetic condition. Powers on, buttons and screen respond well to input. See pictures for more detail. Software is installed on system. Manufacturer: PVA TePla Model #/ Model: Ion 40, 5 Shelf 2 Gas (O2 and AR) Includes: Varian Scroll Pump: S4700317 (tested to 32 mTorr) Ultimate Pressure: 10 mTorr Pumping Speed: 8.8 cfm Model: S4700317 believed to be a TS300 HP: 3/4 RPM: 1725 TriScroll Oil-free Vacuum Pump Franklin Electric Motor PN: 1201006408 HP: 3/4 RPM: 1725 Ph:1 Weight: 65 Lbs Keyboard & Mouse Nor Cal Products Pneumatic Valve PN: ILVP-1502-NWB 1 1/2" Vacuum Hose 3 Shelves The following specifications are taken from the manufacturer's online datasheet and may not be entirely accurate to this system: FEATURES INCLUDE: Small footprint table top design Plug and play self installation Flexible electrode Industrial computer with LCD touch panel and keyboard. Windows based operating system. Graphical User Interface (GUI) software complies with CFR Title 21 Part 11 and Semi E95-1101 Multi-level user access Software (installed on system) Recipe editor for fast and versatile step controls Onboard diagnostic features and alarm logging Remote process monitoring via Ethernet PROCESS CHAMBER Material: Aluminum Dimension: 330 mm W x 483mm D x 229mm H (13x19x9) Volume: 36.43 L (1.29 ft3) Mass Flow Controller (MFC): 2 (1 Extra Option) Process Pressure: (0.16 to 2.66 mbar (120 to 2000) mTorr) Base Pressure: 0.07 mbar (50 mTorr) Pumping Time: 1 min (Pump dependent) PLASMA GENERATOR Frequency/Power: 13.56 MHz/600 W PERFORMANCE DATA Uptime: 95% MTBF: >500 h MTTR: <2 h OPTIONS Shelf electrodes: 3 13.56 Mhz/6000W 2 Total MFCs FACILITIES REQUIREMENTS Electricity: 115V PH: 1 Process Gas Input Pressure: 2 bar (30 psi) Purge Gas Input Pressure: 2 bar (30 psi) Compressed Air Input Pressure: 6 bar (88 psi) ION 40 PLASMA SYSTEM DIMENSION AND WEIGHT 737 mm W x 663 mm D x 711 mm H (29x26x28) Actual Weight: ~380 lbs Shipping Weight: ~500 lbs Crating Fee: $250 Sold as is with 30day Right of Return, only pictured items included Easy return/refund for any reason Anacapa Equipment RETURNS Anacapa Equipment Brokers, Inc. (Seller) strives to offer excellent customer service. You may return any equipment purchased from us for any reason within thirty (30) days after your receipt of the equipment for a full refund of the purchase price, provided that returned items are received in the same condition as sent. We DO NOT ship internationally. If you are using a freight forwarder then returns are VOID. SHIPPING All equipment purchased is shipped within one (1) business day (subject to freight availability) after receipt of payment and is shipped FOB place of shipment. We only charge actual shipping cost. If eBay overcharges for shipping, we issue an immediate refund for the difference. If you are undercharged, we will absorb the cost. We DO NOT ship internationally. IF you are using a freight forwarder then returns are VOID. LIMITED WARRANTY Buyer acknowledges that the equipment is being sold as is" and without any warranty of merchantability or fitness for a particular use. The entire risk as to the quality and performance of the equipment is with the Buyer. Should the equipment prove defective following its purchase the Buyer and not the Seller, manufacturer, distributor, or retailer assumes the entire cost of all necessary servicing or repair. Buyer may inspect the equipment prior to purchase and placement of the order. Failure to inspect prior to placement of an order is deemed a waiver of Buyers right to inspect. Buyer is responsible for determining the suitability of the equipment for its application. Seller assumes no liability for the use or misuse of any equipment purchased by Buyer. It is assumed that the equipment will be installed and operated by qualified personnel. The Buyer agrees that the Seller shall not be held responsible or liable for any injuries or damages, whether incidental or consequential, associated in any way with the equipment purchased. The Buyer, by purchasing this equipment, indicates its acknowledgment of, and agreement, to the terms of this limited warranty . INDEMNITY Buyer shall be solely liable for, and shall defend, indemnify, and hold Seller, its Affiliates, and all of their respective directors, officers, employees, agents, and independent contractors (Indemnitees) harmless from and against any and all damages, liabilities, injuries, losses, costs (including reasonable attorneys and experts fees at trial and on appeal), and expenses which may be incurred by, asserted against, or recoverable from any Indemnitee as a result of any actual or threatened action, suit or proceeding arising out of or relating in any way to the purchase of equipment from Seller. The validity and interpretation of this Agreement and the enforcement thereof shall be governed by the laws of the State of California without regard to any principles governing conflicts of laws. Any dispute arising from the purchase of equipment from Seller must be resolved in the State Courts of California.

Specifications

ManufacturerPVA TePla
ModelS4700317 believed to be a TS300
ConditionUsed
Model #/ ModelIon 40, 5 Shelf 2 Gas (O2 and AR)
Varian Scroll PumpS4700317 (tested to 32 mTorr)
Ultimate Pressure10 mTorr
Pumping Speed8.8 cfm
HP3/4
RPM1725
PNILVP-1502-NWB
HP3/4
Ph1
Weight65 Lbs
MaterialAluminum
Dimension330 mm W x 483mm D x 229mm H
Volume36.43 L (1.29 ft3)
​PNILVP-1502-NWB
Mass Flow Controller (MFC)2 (1 Extra Option)
ModelS4700317 believed to be a TS300
Process Pressure(0.16 to 2.66 mbar
Base Pressure0.07 mbar (50 mTorr)
Pumping Time1 min (Pump dependent)
Frequency/Power13.56 MHz/600 W
Uptime95%
MTBF>500 h
MTTR<2 h
Shelf electrodes3
Process Gas Input Pressure2 bar (30 psi)
Purge Gas Input Pressure2 bar (30 psi)
Compressed Air Input Pressure6 bar (88 psi)
Actual Weight~380 lbs
Shipping Weight~500 lbs
Crating Fee$250
Vacuum Hose1 1/2"