March PX-500 Plasma Treatment System Asher w/ ACG-6B-07 ENI RF Generator (9365)R
No longer available
March PX-500 Plasma Treatment System Asher w/ ACG-6B-07 ENI RF Generator (9365)R
$17,000 (USD)
Goleta, CA
Description
Nordson March PX-500 Plasma Etcher Asher w/ ACG-6B-07 ENI RF Generator Used (9365)R
In good cosmetic condition. Powers on and shows plasma. The vacuum pump is NOT included. If interested please ask about dry scroll pump and chiller availability. See pictures for more detail.
The March PX-500 Plasma Asher is a highly versatile plasma etch tool that can etch using a direct plasma configuration, a downstream plasma, and a directional plasma (Reactive Ion Etch). The March Plasma Asher is used for the removal of photoresists from etched wafers, wafer descum, andwafer cleaning prior to wet etching, among other applications. It is capable of highphotoresist ashing rates with minimalexposure to electrostatic discharge (ESD).
Manufacturer: Nordson March ENI
Model: PX-500,
ACG-6B-07
Mfg: 01/2008
Includes:
ENI RF Generator ACG-6B-07
1 Cooling Plate &
1 Shelf
Voltage: 208-230V
Phase: Single
Freq: 50/60 Hz
Full load Current: 8.5A
Max Current: 20A
Specifications: (These specifications were taken from an online user manual and may not be accurate to this product.)
Stainless Steel chamber taking wafers to 4
13.56 MHz frequency; power output up to 600 W
Microprocessor-controlled
Recipe editor for fast, versatile parameter control
2 mass flow controllers (O2 and N2)
Key Applications and available processes
Photo-resist stripping
Wafer descum/cleaning
Etching of passivation layers
Cleaning of filters and membranes
Chemical trace analysis
MEMS
Photonics
Dimensions
Actual Dimensions: 33x27x27"
Actual Weight: 270 lbs
Shipping Dimensions: 36 x32 x 38, crated
Shipping Weight: 335 #
Crating Fee: $75
Sold as is with 30day Right of Return, only pictured items included
Easy return/refund for any reason
Anacapa Equipment
RETURNS
Anacapa Equipment Brokers, Inc. (Seller) strives to offer excellent customer service. You may return any equipment purchased from us for any reason within thirty (30) days after your receipt of the equipment for a full refund of the purchase price, provided that returned items are received in the same condition as sent. We DO NOT ship internationally. If you are using a freight forwarder then returns are VOID.
SHIPPING
All equipment purchased is shipped within one (1) business day (subject to freight availability) after receipt of payment and is shipped FOB place of shipment. We only charge actual shipping cost. If eBay overcharges for shipping, we issue an immediate refund for the difference. If you are undercharged, we will absorb the cost.
We DO NOT ship internationally. IF you are using a freight forwarder then returns are VOID.
LIMITED WARRANTY
Buyer acknowledges that the equipment is being sold as is" and without any warranty of merchantability or fitness for a particular use. The entire risk as to the quality and performance of the equipment is with the Buyer. Should the equipment prove defective following its purchase the Buyer and not the Seller, manufacturer, distributor, or retailer assumes the entire cost of all necessary servicing or repair. Buyer may inspect the equipment prior to purchase and placement of the order. Failure to inspect prior to placement of an order is deemed a waiver of Buyers right to inspect. Buyer is responsible for determining the suitability of the equipment for its application. Seller assumes no liability for the use or misuse of any equipment purchased by Buyer. It is assumed that the equipment will be installed and operated by qualified personnel. The Buyer agrees that the Seller shall not be held responsible or liable for any injuries or damages, whether incidental or consequential, associated in any way with the equipment purchased.
The Buyer, by purchasing this equipment, indicates its acknowledgment of, and agreement, to the terms of this limited warranty
.
INDEMNITY
Buyer shall be solely liable for, and shall defend, indemnify, and hold Seller, its Affiliates, and all of their respective directors, officers, employees, agents, and independent contractors (Indemnitees) harmless from and against any and all damages, liabilities, injuries, losses, costs (including reasonable attorneys and experts fees at trial and on appeal), and expenses which may be incurred by, asserted against, or recoverable from any Indemnitee as a result of any actual or threatened action, suit or proceeding arising out of or relating in any way to the purchase of equipment from Seller. The validity and interpretation of this Agreement and the enforcement thereof shall be governed by the laws of the State of California without regard to any principles governing conflicts of laws. Any dispute arising from the purchase of equipment from Seller must be resolved in the State Courts of California.
Specifications
Manufacturer | Nordson March ENI |
Model | PX-500, |
Condition | Used |
Mfg | 01/2008 |
Voltage | 208-230V |
Phase | Single |
Freq | 50/60 Hz |
Full load Current | 8.5A |
Max Current | 20A |
Specifications | (These specifications were taken from an online user manual and may not be accurate to this product.) |
Actual Dimensions | 33x27x27" |
Actual Weight | 270 lbs |
Shipping Dimensions | 36 x32 x 38, crated |
Shipping Weight | 335 # |
Crating Fee | $75 |